{"id":1365,"date":"2019-05-05T00:00:00","date_gmt":"2019-05-05T00:00:00","guid":{"rendered":"https:\/\/cskbs.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55.html"},"modified":"2023-05-01T23:06:49","modified_gmt":"2023-05-01T16:06:49","slug":"hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55","status":"publish","type":"post","link":"https:\/\/cskbs.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55","title":{"rendered":"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55"},"content":{"rendered":"<div class=\"single-latest-text\">\n<div class=\"single-item-comment-view d-none\"><i class=\"zmdi zmdi-calendar-check\"><\/i>05\/05\/2019<br \/>\n&lt;!&#8211;<i class=\"zmdi zmdi-eye\"><\/i>59<br \/>\n<i class=\"zmdi zmdi-comments\"><\/i>19&#8211;&gt;<\/div>\n<p><span style=\"font-size: 18px;\"><span style=\"font-family: Times New Roman,Times,serif;\">H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55.<\/span><\/span><\/p>\n<p><span style=\"font-size: 18px;\"><span style=\"font-family: Times New Roman,Times,serif;\">DESIGN AND SIMULATION ANALYSIS OF AN ELECTROSTATIC ACTUATOR FOR IMPROVING THE PERFORMANCE OF SCANNING PROBE NANOLITHOGRAPHY<\/span><\/span><\/p>\n<p><a href=\"https:\/\/drive.google.com\/file\/d\/1ZqWvtX1esVlq-Ffwh9Q0XFkzN2f1aFtp\/view?usp=sharing\"><span style=\"color: #ff0000;\"><span style=\"font-size: 18px;\"><span style=\"font-family: Times New Roman,Times,serif;\"><strong>(Chi ti\u1ebft xem t\u1ea1i \u0111\u00e2y)<\/strong><\/span><\/span><\/span><\/a><\/p>\n<p style=\"text-align: center;\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter size-full wp-image-14904\" src=\"https:\/\/cskbs.com\/wp-content\/uploads\/2019\/05\/tapchiKH26CN_2019.jpg\" alt=\"\" width=\"377\" height=\"545\" srcset=\"https:\/\/cskbs.com\/wp-content\/uploads\/2019\/05\/tapchiKH26CN_2019.jpg 377w, https:\/\/cskbs.com\/wp-content\/uploads\/2019\/05\/tapchiKH26CN_2019-208x300.jpg 208w\" sizes=\"(max-width: 377px) 100vw, 377px\" \/><\/p>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>05\/05\/2019 &lt;!&#8211;59 19&#8211;&gt; H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. DESIGN AND SIMULATION ANALYSIS OF AN ELECTROSTATIC ACTUATOR FOR IMPROVING THE PERFORMANCE OF SCANNING PROBE NANOLITHOGRAPHY (Chi ti\u1ebft xem t\u1ea1i \u0111\u00e2y)<\/p>\n","protected":false},"author":4,"featured_media":1366,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[21],"tags":[],"acf":[],"yoast_head":"\n<title>H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55 - \u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4<\/title>\n<meta name=\"description\" content=\"05\/05\/2019 &lt;!--59 19--&gt; H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. 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